Chun-Hsiang Kung

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Self-healing polishing pad
- Patent number 12,087,590
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Hao Kung
- B24 - GRINDING POLISHING
Information Patent Grant
Mega-sonic vibration assisted chemical mechanical planarization
- Patent number 12,036,636
- Issue date Jul 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical polishing apparatus and method
- Patent number 11,964,358
- Issue date Apr 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shang-Yu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic slurry for highly efficiency CMP
- Patent number 11,854,827
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Ting Chen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Semiconductor device structure with interconnect structure and meth...
- Patent number 11,854,872
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mega-sonic vibration assisted chemical mechanical planarization
- Patent number 11,590,627
- Issue date Feb 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-healing polishing pad
- Patent number 11,551,936
- Issue date Jan 10, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Hao Kung
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor device structure with interconnect structure and meth...
- Patent number 11,417,566
- Issue date Aug 16, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plating apparatus and method for electroplating wafer
- Patent number 11,401,624
- Issue date Aug 2, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Che-Min Lin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Chemical mechanical polishing method
- Patent number 11,373,879
- Issue date Jun 28, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tung-Kai Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure with doped contact plug and method for form...
- Patent number 11,145,751
- Issue date Oct 12, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuo-Ju Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic slurry for highly efficient CMP
- Patent number 11,056,352
- Issue date Jul 6, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Ting Chen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Chemical mechanical polish slurry and method of manufacture
- Patent number 11,043,396
- Issue date Jun 22, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hao Kung
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Chemical mechanical polishing apparatus and method
- Patent number 10,953,514
- Issue date Mar 23, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shang-Yu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical polishing method
- Patent number 10,777,423
- Issue date Sep 15, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tung-Kai Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CMP cleaning system and method
- Patent number 10,741,381
- Issue date Aug 11, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kaw-Wei Kuo
- B08 - CLEANING
Information Patent Grant
Anti-ESD photomask and method of forming the same
- Patent number 10,126,643
- Issue date Nov 13, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Hung Kung
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for photolithography in semiconductor manufacturing
- Patent number 7,968,258
- Issue date Jun 28, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Yu Su
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for repairing opaque defects on semiconductor mask reticles
- Patent number 7,223,503
- Issue date May 29, 2007
- Taiwan Semiconductor Manufacturing Company
- Wei-Lian Lin
- G01 - MEASURING TESTING
Information Patent Grant
Method of repairing PSM to keep normal transmission rate and phase...
- Patent number 6,767,673
- Issue date Jul 27, 2004
- Taiwan Semiconductor Manufacturing Company
- Chun-Hung Kung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method for Levenson PSM mask
- Patent number 6,396,944
- Issue date May 28, 2002
- Taiwan Semiconductor Manufacturing Company
- Chun-Hung Kung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL MECHANICAL POLISH SLURRY AND METHOD OF MANUFACTURE
- Publication number 20240395562
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SELF-HEALING POLISHING PAD
- Publication number 20240371648
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- B24 - GRINDING POLISHING
Information Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD
- Publication number 20240217054
- Publication date Jul 4, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shang-Yu Wang
- B24 - GRINDING POLISHING
Information Patent Application
Semiconductor Device Structure with Interconnect Structure and Meth...
- Publication number 20240087951
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEGA-SONIC VIBRATION ASSISTED CHEMICAL MECHANICAL PLANARIZATION
- Publication number 20230219188
- Publication date Jul 13, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-HEALING POLISHING PAD
- Publication number 20230118617
- Publication date Apr 20, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL MECHANICAL POLISHING METHOD
- Publication number 20230078573
- Publication date Mar 16, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- TUNG-KAI CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device Structure with Interconnect Structure and Meth...
- Publication number 20220367257
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATING APPARATUS AND METHOD FOR ELECTROPLATING WAFER
- Publication number 20220356594
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Che-Min Lin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATING APPARATUS AND METHOD FOR ELECTROPLATING WAFER
- Publication number 20220025540
- Publication date Jan 27, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Che-Min Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnetic Slurry for Highly Efficiency CMP
- Publication number 20210327720
- Publication date Oct 21, 2021
- Taiwan Semiconductor Manufacturing Co, LTD.
- Yen-Ting Chen
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Chemical Mechanical Polish Slurry and Method of Manufacture
- Publication number 20210313190
- Publication date Oct 7, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD
- Publication number 20210205950
- Publication date Jul 8, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shang-Yu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD
- Publication number 20210078130
- Publication date Mar 18, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Yu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEGA-SONIC VIBRATION ASSISTED CHEMICAL MECHANICAL PLANARIZATION
- Publication number 20210016415
- Publication date Jan 21, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL MECHANICAL POLISHING METHOD
- Publication number 20200411329
- Publication date Dec 31, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- TUNG-KAI CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-HEALING POLISHING PAD
- Publication number 20200039022
- Publication date Feb 6, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hao Kung
- B24 - GRINDING POLISHING
Information Patent Application
Semiconductor Device Structure with Interconnect Structure and Meth...
- Publication number 20200043777
- Publication date Feb 6, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hao Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical Mechanical Polish Slurry and Method of Manufacture
- Publication number 20200043745
- Publication date Feb 6, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hao Kung
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Magnetic Slurry for Highly Efficient CMP
- Publication number 20200043747
- Publication date Feb 6, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Ting Chen
- B24 - GRINDING POLISHING
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH DOPED CONTACT PLUG AND METHOD FOR FORM...
- Publication number 20190305107
- Publication date Oct 3, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Ju CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL MECHANICAL POLISHING METHOD
- Publication number 20190157103
- Publication date May 23, 2019
- Taiwan Semiconductor Manufacturing company Ltd.
- TUNG-KAI CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CMP Cleaning System and Method
- Publication number 20180174829
- Publication date Jun 21, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kaw-Wei Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTI-ESD PHOTOMASK AND METHOD OF FORMING THE SAME
- Publication number 20180164676
- Publication date Jun 14, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hung Kung
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Novel organic remover for advanced reticle contamination cleaning
- Publication number 20070066071
- Publication date Mar 22, 2007
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hsien Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Flat bed scanner
- Publication number 20060279807
- Publication date Dec 14, 2006
- Chun-Hsiang Kung
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
System and method for photolithography in semiconductor manufacturing
- Publication number 20060257765
- Publication date Nov 16, 2006
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Yu Su
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reticle film stabilizing method
- Publication number 20050260503
- Publication date Nov 24, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Lian Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for repairing opaque defects on semiconductor mask reticles
- Publication number 20050146715
- Publication date Jul 7, 2005
- Wei-Lian Lin
- G01 - MEASURING TESTING

Chun-Hsiang Kung

Person

Patents Grantslast 30 patents

Self-healing polishing pad

Mega-sonic vibration assisted chemical mechanical planarization

Chemical mechanical polishing apparatus and method

Magnetic slurry for highly efficiency CMP

Semiconductor device structure with interconnect structure and meth...

Mega-sonic vibration assisted chemical mechanical planarization

Self-healing polishing pad

Semiconductor device structure with interconnect structure and meth...

Plating apparatus and method for electroplating wafer

Chemical mechanical polishing method

Semiconductor structure with doped contact plug and method for form...

Magnetic slurry for highly efficient CMP

Chemical mechanical polish slurry and method of manufacture

Chemical mechanical polishing apparatus and method

Chemical mechanical polishing method

CMP cleaning system and method

Anti-ESD photomask and method of forming the same

System and method for photolithography in semiconductor manufacturing

Method for repairing opaque defects on semiconductor mask reticles

Method of repairing PSM to keep normal transmission rate and phase...

Inspection method for Levenson PSM mask

Patents Applicationslast 30 patents

CHEMICAL MECHANICAL POLISH SLURRY AND METHOD OF MANUFACTURE

SELF-HEALING POLISHING PAD

CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD

Semiconductor Device Structure with Interconnect Structure and Meth...

MEGA-SONIC VIBRATION ASSISTED CHEMICAL MECHANICAL PLANARIZATION

SELF-HEALING POLISHING PAD

CHEMICAL MECHANICAL POLISHING METHOD

Semiconductor Device Structure with Interconnect Structure and Meth...

PLATING APPARATUS AND METHOD FOR ELECTROPLATING WAFER

PLATING APPARATUS AND METHOD FOR ELECTROPLATING WAFER

Magnetic Slurry for Highly Efficiency CMP

Chemical Mechanical Polish Slurry and Method of Manufacture

CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD

CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD

MEGA-SONIC VIBRATION ASSISTED CHEMICAL MECHANICAL PLANARIZATION

CHEMICAL MECHANICAL POLISHING METHOD

SELF-HEALING POLISHING PAD

Semiconductor Device Structure with Interconnect Structure and Meth...

Chemical Mechanical Polish Slurry and Method of Manufacture

Magnetic Slurry for Highly Efficient CMP

SEMICONDUCTOR STRUCTURE WITH DOPED CONTACT PLUG AND METHOD FOR FORM...

CHEMICAL MECHANICAL POLISHING METHOD

CMP Cleaning System and Method

ANTI-ESD PHOTOMASK AND METHOD OF FORMING THE SAME

Novel organic remover for advanced reticle contamination cleaning

Flat bed scanner

System and method for photolithography in semiconductor manufacturing

Reticle film stabilizing method

Method for repairing opaque defects on semiconductor mask reticles