Membership
Tour
Register
Log in
Chun Lu
Follow
Person
Tempe, AZ, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Tungsten chemical mechanical polishing for reduced oxide erosion
Patent number
11,643,599
Issue date
May 9, 2023
VERSUM MATERIALS US, LLC
Chun Lu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Tungsten Chemical Mechanical Polishing For Reduced Oxide Erosion
Publication number
20200024515
Publication date
Jan 23, 2020
VERSUM MATERIALS US, LLC
Chun Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Tungsten Chemical Mechanical Polishing Compositions
Publication number
20190382619
Publication date
Dec 19, 2019
VERSUM MATERIALS US, LLC
Xiaobo Shi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Chemical Mechanical Polishing Tungsten Buffing Slurries
Publication number
20190352535
Publication date
Nov 21, 2019
VERSUM MATERIALS US, LLC
Xiaobo Shi
H01 - BASIC ELECTRIC ELEMENTS