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last 30 patents
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Patent Grant
Method and system for processing substrate in semiconductor fabrica...
Patent number
12,090,527
Issue date
Sep 17, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Syuan Jhuan
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods for processing substrate in semiconductor fabrication
Patent number
10,780,461
Issue date
Sep 22, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Syuan Jhuan
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD AND SYSTEM FOR PROCESSING SUBSTRATE IN SEMICONDUCTOR FABRICA...
Publication number
20200316654
Publication date
Oct 8, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Syuan JHUAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR PROCESSING SUBSTRATE IN SEMICONDUCTOR FABRICA...
Publication number
20160336200
Publication date
Nov 17, 2016
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Syuan JHUAN
B08 - CLEANING