Chun-Teh KAO

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Cupertino, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Counter-flow multi inject for atomic layer deposition chamber
- Patent number 10,982,326
- Issue date Apr 20, 2021
- Applied Materials, Inc.
- Dien-Yeh Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition chamber with counter-flow multi inject
- Patent number 10,487,399
- Issue date Nov 26, 2019
- Applied Materials, Inc.
- Dien-Yeh Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER DEPOSITION CHAMBER WITH COUNTER-FLOW MULTI INJECT
- Publication number 20200087784
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Dien-Yeh WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION CHAMBER WITH COUNTER-FLOW MULTI INJECT
- Publication number 20150376784
- Publication date Dec 31, 2015
- Applied Materials, Inc.
- Dien-Yeh WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...