Chun Wang CHAN

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Cambridge, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck having a gas flow feature, and related methods
- Patent number 11,837,492
- Issue date Dec 5, 2023
- Entegris, Inc.
- Yan Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with charge dissipation coating
- Patent number 11,742,781
- Issue date Aug 29, 2023
- Entegris, Inc.
- Yan Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck with embossments that comprise diamond-like car...
- Patent number 11,612,972
- Issue date Mar 28, 2023
- Entegris, Inc.
- Yan Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Spiraling polyphase electrodes for electrostatic chuck
- Patent number 11,417,557
- Issue date Aug 16, 2022
- Entegris, Inc.
- Chun Wang Chan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Grounding mechanism for multi-layer for electrostatic chuck, and re...
- Patent number 11,309,207
- Issue date Apr 19, 2022
- Entegris, Inc.
- Steven Donnell
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SPIRALING POLYPHASE ELECTRODES FOR ELECTROSTATIC CHUCK
- Publication number 20220189811
- Publication date Jun 16, 2022
- Entegris, Inc.
- Chun Wang CHAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH EMBOSSMENTS THAT COMPRISE DIAMOND-LIKE CAR...
- Publication number 20220063035
- Publication date Mar 3, 2022
- Entegris, Inc.
- Yan LIU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTROSTATIC CHUCK HAVING A GAS FLOW FEATURE, AND RELATED METHODS
- Publication number 20210351061
- Publication date Nov 11, 2021
- Entegris, Inc.
- Yan LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUNDING MECHANISM FOR MULTI-LAYER FOR ELECTROSTATIC CHUCK, AND RE...
- Publication number 20210028046
- Publication date Jan 28, 2021
- Entegris, Inc.
- Steven DONNELL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH CHARGE DISSIPATION COATING
- Publication number 20200161158
- Publication date May 21, 2020
- Entegris, Inc.
- Yan LIU
- H01 - BASIC ELECTRIC ELEMENTS