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Chunbo Zhang
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Ann Arbor, MI, US
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Patents Grants
last 30 patents
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Patent Grant
Method of making a thick microstructural oxide layer
Patent number
6,962,831
Issue date
Nov 8, 2005
The Regents of the University of Michigan
Khalil Najafi
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Method of making a thick microstructural oxide layer and device uti...
Publication number
20030224565
Publication date
Dec 4, 2003
Khalil Najafi
B81 - MICRO-STRUCTURAL TECHNOLOGY