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Chung- Shih Shen
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Hsin-Chu City, TW
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Patents Grants
last 30 patents
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Patent Grant
Method for reducing particles during ion implantation
Patent number
7,199,383
Issue date
Apr 3, 2007
United Microelectronics Corp.
Jui-Fang Chen
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD FOR REDUCING PARTICLES DURING ION IMPLANTATION
Publication number
20070045568
Publication date
Mar 1, 2007
Jui-Fang Chen
H01 - BASIC ELECTRIC ELEMENTS