Membership
Tour
Register
Log in
Chung-Fu Chu
Follow
Person
Cupertino, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Post-etch treatment of plasma-etched feature surfaces to prevent co...
Patent number
6,153,530
Issue date
Nov 28, 2000
Applied Materials, Inc.
Yan Ye
H01 - BASIC ELECTRIC ELEMENTS