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Hsin-chu City, TW
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Patents Grants
last 30 patents
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Patent Grant
Dual trench alternating phase shift mask fabrication
Patent number
7,445,159
Issue date
Nov 4, 2008
Taiwan Semiconductor Manufacturing Co., Ltd.
San-De Tzu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Dual trench alternating phase shift mask fabrication
Publication number
20070190793
Publication date
Aug 16, 2007
Taiwan Semiconductor Manufacturing Co., Ltd.
San-De Tzu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY