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Chung-Jung Cheng
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Hsin-Chu Hsien, TW
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last 30 patents
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Patent Grant
Chemical-mechanical polishing apparatus and method of conditioning...
Patent number
7,223,157
Issue date
May 29, 2007
United Microelectronics Corp.
Sheng-Yu Chen
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
CMP SLURRY DELIVERY SYSTEM AND METHOD OF MIXING SLURRY THEREOF
Publication number
20070060028
Publication date
Mar 15, 2007
Sheng-Yu Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHEMICAL-MECHANICAL POLISHING APPARATUS AND METHOD OF CONDITIONING...
Publication number
20070049183
Publication date
Mar 1, 2007
Sheng-Yu Chen
B24 - GRINDING POLISHING
Information
Patent Application
CMP SLURRY DELIVERY SYSTEM AND METHOD OF MIXING SLURRY THEREOF
Publication number
20060191871
Publication date
Aug 31, 2006
Sheng-Yu Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...