Chung-Yi Chiu

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Tainan City, TW

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Patents Grantslast 30 patents

Information Patent Grant
MEMS structure with an etch stop layer buried within inter-dielectr...
- Patent number 10,927,000
- Issue date Feb 23, 2021
- United Microelectronics Corp.
- Li-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming MEMS structure with an etch stop layer buried wi...
- Patent number 9,499,399
- Issue date Nov 22, 2016
- United Microelectronics Corp.
- Li-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS STRUCTURE WITH AN ETCH STOP LAYER BURIED WITHIN INTER-DIELECTR...
- Publication number 20170036905
- Publication date Feb 9, 2017
- UNITED MICROELECTRONICS CORP.
- Li-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS structure and method of forming the same
- Publication number 20140367805
- Publication date Dec 18, 2014
- Li-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY