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Chungho Cho
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Suwon-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method fabricating semiconductor device
Patent number
12,014,905
Issue date
Jun 18, 2024
Samsung Electronics Co., Ltd.
Nam Kyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,600,511
Issue date
Mar 7, 2023
Samsung Electronics Co., Ltd.
Kihong Cho
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD FABRICATING SEMICONDUCTOR DEVICE
Publication number
20220165552
Publication date
May 26, 2022
Samsung Electronics Co., Ltd.
NAM KYUN KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20210296153
Publication date
Sep 23, 2021
Samsung Electronics Co., Ltd.
Kihong CHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA SYSTEM, PLASMA PROCESSING METHOD, AND PLASMA ETCHING METHOD
Publication number
20170186586
Publication date
Jun 29, 2017
Samsung Electronics Co., Ltd.
Sejin Oh
H01 - BASIC ELECTRIC ELEMENTS