Chungjong LEE

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Patents Grantslast 30 patents

Information Patent Grant
Tool health monitoring and classifications with virtual metrology a...
- Patent number 11,669,079
- Issue date Jun 6, 2023
- Tokyo Electron Limited
- Jun Shinagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching organic film
- Patent number 9,735,027
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Chungjong Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
AUTONOMOUS OPERATION OF PLASMA PROCESSING TOOL
- Publication number 20230352282
- Publication date Nov 2, 2023
- TOKYO ELECTRON LIMITED
- Jun SHINAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA FUSION OF MULTIPLE SENSORS
- Publication number 20230317483
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Masaki KITSUNEZUKA
- G05 - CONTROLLING REGULATING
Information Patent Application
TOOL HEALTH MONITORING AND CLASSIFICATIONS WITH VIRTUAL METROLOGY A...
- Publication number 20230009419
- Publication date Jan 12, 2023
- TOKYO ELECTRON LIMITED
- Jun SHINAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ETCHING ORGANIC FILM
- Publication number 20160307775
- Publication date Oct 20, 2016
- TOKYO ELECTRON LIMITED
- Chungjong LEE
- H01 - BASIC ELECTRIC ELEMENTS