CHUNGUANG XIA

Person

TUALATIN, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 11,725,282
- Issue date Aug 15, 2023
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Immersion projection micro stereolithography
- Patent number 11,654,617
- Issue date May 23, 2023
- BMF MATERIAL TECHNOLOGY INC.
- Chunguang Xia
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Immersion multi-material projection micro stereolithography with no...
- Patent number 11,654,619
- Issue date May 23, 2023
- BMF MATERIAL TECHNOLOGY INC.
- Chunguang Xia
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 11,111,581
- Issue date Sep 7, 2021
- Lam Research Corporation
- Chunguang Xia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Guiding device and associated system
- Patent number 10,955,749
- Issue date Mar 23, 2021
- ASML Netherlands B.V.
- Dzmitry Labetski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 10,287,683
- Issue date May 14, 2019
- Lam Research Corporation
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controlled fluid flow for cleaning an optical element
- Patent number 10,232,413
- Issue date Mar 19, 2019
- ASML Netherlands B.V.
- Silvia De Dea
- B08 - CLEANING
Information Patent Grant
Controlled fluid flow for cleaning an optical element
- Patent number 9,776,218
- Issue date Oct 3, 2017
- ASML Netherlands B.V.
- Silvia De Dea
- B08 - CLEANING
Information Patent Grant
Chemical deposition apparatus having conductance control
- Patent number 9,490,149
- Issue date Nov 8, 2016
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppression of parasitic deposition in a substrate processing syste...
- Patent number 9,388,494
- Issue date Jul 12, 2016
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Point of use valve manifold for semiconductor fabrication equipment
- Patent number 8,985,152
- Issue date Mar 24, 2015
- Novellus Systems, Inc.
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Systems and Methods for Releasing a Membrane in Resin 3-D Printing
- Publication number 20240198587
- Publication date Jun 20, 2024
- BMF MATERIAL TECHNOLOGY INC.
- Chunguang XIA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
GUIDING DEVICE AND ASSOCIATED SYSTEM
- Publication number 20240085796
- Publication date Mar 14, 2024
- ASML NETHERLANDS B.V.
- Dzmitry LABETSKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
A MULTI-SCALE SYSTEM FOR PROJECTION MICRO STEREOLITHOGRAPHY
- Publication number 20230398739
- Publication date Dec 14, 2023
- BMF MATERIAL TECHNOLOGY INC.
- Chunguang XIA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SYSTEM AND METHOD OF LOW-WASTE MULTI-MATERIAL RESIN PRINTING
- Publication number 20230045800
- Publication date Feb 16, 2023
- BMF Nano Material Technology Co., Ltd
- Chunguang XIA
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
METHODS OF CONTROLLING DIMENSIONS IN PROJECTION MICRO STEREOLITHOGR...
- Publication number 20220048254
- Publication date Feb 17, 2022
- BMF Precision Technology (Wuxi) Inc.
- Chunguang XIA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...
- Publication number 20210381106
- Publication date Dec 9, 2021
- Novellus Systems, Inc.
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROLLER-MEMBRANE LAYERING MICRO STEREOLITHOGRAPHY
- Publication number 20210299952
- Publication date Sep 30, 2021
- BMF MATERIAL TECHNOLOGY INC.
- Chunguang XIA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMMERSION MULTI-MATERIAL PROJECTION MICRO STEREOLITHOGRAPHY
- Publication number 20210276249
- Publication date Sep 9, 2021
- BMF MATERIAL TECHNOLOGY INC.
- Chunguang XIA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMMERSION PROJECTION MICRO STERIOLITHOGRAPHY
- Publication number 20210237345
- Publication date Aug 5, 2021
- Chunguang XIA
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
GUIDING DEVICE AND ASSOCIATED SYSTEM
- Publication number 20210141311
- Publication date May 13, 2021
- ASML NETHERLANDS B.V.
- Dzmitry LABETSKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CLEANING A STRUCTURE SURFACE IN AN EUV CHAMBER
- Publication number 20210063899
- Publication date Mar 4, 2021
- Chunguang Xia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GUIDING DEVICE AND ASSOCIATED SYSTEM
- Publication number 20200089124
- Publication date Mar 19, 2020
- ASML NETHERLANDS B.V.
- Dzmitry LABETSKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...
- Publication number 20190271081
- Publication date Sep 5, 2019
- LAM RESEARCH CORPORATION
- Chunguang XIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROLLED FLUID FLOW FOR CLEANING AN OPTICAL ELEMENT
- Publication number 20170361359
- Publication date Dec 21, 2017
- ASML NETHERLANDS B.V.
- Silvia De Dea
- B08 - CLEANING
Information Patent Application
CONTROLLED FLUID FLOW FOR CLEANING AN OPTICAL ELEMENT
- Publication number 20170036252
- Publication date Feb 9, 2017
- ASML NETHERLANDS B.V.
- Silvia De Dea
- B08 - CLEANING
Information Patent Application
Chemical Deposition Apparatus Having Conductance Control
- Publication number 20170009348
- Publication date Jan 12, 2017
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...
- Publication number 20160289832
- Publication date Oct 6, 2016
- Novellus Systems, Inc
- Chunguang Xia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL DEPOSITION APPARATUS HAVING CONDUCTANCE CONTROL
- Publication number 20150011095
- Publication date Jan 8, 2015
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...
- Publication number 20130344245
- Publication date Dec 26, 2013
- Novellus Systems, Inc.
- CHUNGUANG XIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POINT OF USE VALVE MANIFOLD FOR SEMICONDUCTOR FABRICATION EQUIPMENT
- Publication number 20130333768
- Publication date Dec 19, 2013
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

CHUNGUANG XIA

Person

Patents Grantslast 30 patents

Suppression of parasitic deposition in a substrate processing syste...

Immersion projection micro stereolithography

Immersion multi-material projection micro stereolithography with no...

Suppression of parasitic deposition in a substrate processing syste...

Guiding device and associated system

Suppression of parasitic deposition in a substrate processing syste...

Controlled fluid flow for cleaning an optical element

Controlled fluid flow for cleaning an optical element

Chemical deposition apparatus having conductance control

Suppression of parasitic deposition in a substrate processing syste...

Point of use valve manifold for semiconductor fabrication equipment

Patents Applicationslast 30 patents

Systems and Methods for Releasing a Membrane in Resin 3-D Printing

GUIDING DEVICE AND ASSOCIATED SYSTEM

A MULTI-SCALE SYSTEM FOR PROJECTION MICRO STEREOLITHOGRAPHY

SYSTEM AND METHOD OF LOW-WASTE MULTI-MATERIAL RESIN PRINTING

METHODS OF CONTROLLING DIMENSIONS IN PROJECTION MICRO STEREOLITHOGR...

SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...

ROLLER-MEMBRANE LAYERING MICRO STEREOLITHOGRAPHY

IMMERSION MULTI-MATERIAL PROJECTION MICRO STEREOLITHOGRAPHY

IMMERSION PROJECTION MICRO STERIOLITHOGRAPHY

GUIDING DEVICE AND ASSOCIATED SYSTEM

CLEANING A STRUCTURE SURFACE IN AN EUV CHAMBER

GUIDING DEVICE AND ASSOCIATED SYSTEM

SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...

CONTROLLED FLUID FLOW FOR CLEANING AN OPTICAL ELEMENT

CONTROLLED FLUID FLOW FOR CLEANING AN OPTICAL ELEMENT

Chemical Deposition Apparatus Having Conductance Control

SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...

CHEMICAL DEPOSITION APPARATUS HAVING CONDUCTANCE CONTROL

SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTE...

POINT OF USE VALVE MANIFOLD FOR SEMICONDUCTOR FABRICATION EQUIPMENT