Chunhai Wang

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for rotating an optical objective
- Patent number 11,733,172
- Issue date Aug 22, 2023
- KLA Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Surface defect inspection with large particle monitoring and laser...
- Patent number 10,324,045
- Issue date Jun 18, 2019
- KLA-Tencor Corporation
- Steve (Yifeng) Cui
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus to fold optics in tools for measuring shape an...
- Patent number 9,903,708
- Issue date Feb 27, 2018
- KLA-Tencor Corporation
- Chunhai Wang
- G02 - OPTICS
Information Patent Grant
Method and apparatus to fold optics in tools for measuring shape an...
- Patent number 9,279,663
- Issue date Mar 8, 2016
- KLA-Tencor Corporation
- Chunhai Wang
- G01 - MEASURING TESTING
Information Patent Grant
Reducing registration error of front and back wafer surfaces utiliz...
- Patent number 9,163,928
- Issue date Oct 20, 2015
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
GAS FLOW CONFIGURATIONS FOR SEMICONDUCTOR INSPECTIONS
- Publication number 20240230555
- Publication date Jul 11, 2024
- KLA Corporation
- Chunhai Wang
- G01 - MEASURING TESTING
Information Patent Application
GAS FLOW CONFIGURATIONS FOR SEMICONDUCTOR INSPECTIONS
- Publication number 20240133825
- Publication date Apr 25, 2024
- KLA Corporation
- Chunhai Wang
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR ROTATING AN OPTICAL OBJECTIVE
- Publication number 20210356406
- Publication date Nov 18, 2021
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
Surface Defect Inspection With Large Particle Monitoring And Laser...
- Publication number 20180038803
- Publication date Feb 8, 2018
- KLA-Tencor Corporation
- Steve (Yifeng) Cui
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus to Fold Optics in Tools for Measuring Shape an...
- Publication number 20160265904
- Publication date Sep 15, 2016
- KLA-Tencor Corporation
- Chunhai Wang
- G02 - OPTICS
Information Patent Application
REDUCING REGISTRATION ERROR OF FRONT AND BACK WAFER SURFACES UTILIZ...
- Publication number 20150192404
- Publication date Jul 9, 2015
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
A DUAL INTERFEROMETER SYSTEM WITH A SHORT REFERENCE FLAT DISTANCE F...
- Publication number 20150176973
- Publication date Jun 25, 2015
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
Reducing Registration Error of Front and Back Wafer Surfaces Utiliz...
- Publication number 20140313516
- Publication date Oct 23, 2014
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS TO FOLD OPTICS IN TOOLS FOR MEASURING SHAPE AN...
- Publication number 20140029016
- Publication date Jan 30, 2014
- KLA-Tencor Corporation
- Chunhai Wang
- G01 - MEASURING TESTING

Chunhai Wang

Person

Patents Grantslast 30 patents

Apparatus and method for rotating an optical objective

Surface defect inspection with large particle monitoring and laser...

Method and apparatus to fold optics in tools for measuring shape an...

Method and apparatus to fold optics in tools for measuring shape an...

Reducing registration error of front and back wafer surfaces utiliz...

Patents Applicationslast 30 patents

GAS FLOW CONFIGURATIONS FOR SEMICONDUCTOR INSPECTIONS

GAS FLOW CONFIGURATIONS FOR SEMICONDUCTOR INSPECTIONS

APPARATUS AND METHOD FOR ROTATING AN OPTICAL OBJECTIVE

Surface Defect Inspection With Large Particle Monitoring And Laser...

Method and Apparatus to Fold Optics in Tools for Measuring Shape an...

REDUCING REGISTRATION ERROR OF FRONT AND BACK WAFER SURFACES UTILIZ...

A DUAL INTERFEROMETER SYSTEM WITH A SHORT REFERENCE FLAT DISTANCE F...

Reducing Registration Error of Front and Back Wafer Surfaces Utiliz...

METHOD AND APPARATUS TO FOLD OPTICS IN TOOLS FOR MEASURING SHAPE AN...