Chunhua Song

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Jamesville, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Unconsumed precursor monitoring
- Patent number 11,929,270
- Issue date Mar 12, 2024
- Mohamed Buhary Rinzan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Unconsumed precursor monitoring
- Patent number 11,335,575
- Issue date May 17, 2022
- Inficon, Inc.
- Mohamed Buhary Rinzan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
QUARTZ CRYSTAL MICROBALANCE (QCM) SENSOR HAVING RAPID REGISTRATION...
- Publication number 20240329001
- Publication date Oct 3, 2024
- Inficon, Inc.
- David Y. Lee
- G01 - MEASURING TESTING
Information Patent Application
A SYSTEM AND METHOD FOR MASS FLOW MEASUREMENT AND CONTROL OF PROCES...
- Publication number 20240263313
- Publication date Aug 8, 2024
- Inficon, Inc.
- Steve Lakeman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR DECONVOLUTION OF REAL-TIME MASS FROM THE INFL...
- Publication number 20240241083
- Publication date Jul 18, 2024
- Inficon, Inc.
- Chunhua Song
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR MONITORING SEMICONDUCTOR PROCESSES
- Publication number 20230135167
- Publication date May 4, 2023
- Inficon Inc.
- Matan Lapidot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNCONSUMED PRECURSOR MONITORING
- Publication number 20220285184
- Publication date Sep 8, 2022
- Inficon, Inc.
- Mohamed Buhary Rinzan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNCONSUMED PRECURSOR MONITORING
- Publication number 20200176291
- Publication date Jun 4, 2020
- Inficon Inc.
- Mohamed Buhary Rinzan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...