Chunhua Song

Person

  • Jamesville, NY, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Unconsumed precursor monitoring

    • Patent number 11,929,270
    • Issue date Mar 12, 2024
    • Mohamed Buhary Rinzan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Unconsumed precursor monitoring

    • Patent number 11,335,575
    • Issue date May 17, 2022
    • Inficon, Inc.
    • Mohamed Buhary Rinzan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SYSTEM AND METHOD FOR MONITORING SEMICONDUCTOR PROCESSES

    • Publication number 20230135167
    • Publication date May 4, 2023
    • Inficon Inc.
    • Matan Lapidot
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    UNCONSUMED PRECURSOR MONITORING

    • Publication number 20220285184
    • Publication date Sep 8, 2022
    • Inficon, Inc.
    • Mohamed Buhary Rinzan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    UNCONSUMED PRECURSOR MONITORING

    • Publication number 20200176291
    • Publication date Jun 4, 2020
    • Inficon Inc.
    • Mohamed Buhary Rinzan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...