Chunhung Chen

Person

  • Youngjing, TW

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD OF USING POLISHING PAD

    • Publication number 20240359288
    • Publication date Oct 31, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • ChunHung CHEN
    • B24 - GRINDING POLISHING
  • Information Patent Application

    METHOD OF USING POLISHING PAD

    • Publication number 20230339068
    • Publication date Oct 26, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • ChunHung CHEN
    • B24 - GRINDING POLISHING
  • Information Patent Application

    IRREGULAR MECHANICAL MOTION DETECTION SYSTEMS AND METHOD

    • Publication number 20230330803
    • Publication date Oct 19, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Chunhung Chen
    • B24 - GRINDING POLISHING
  • Information Patent Application

    METHOD OF CHEMICAL MECHANICAL POLISH OPERATION AND CHEMICAL MECHANI...

    • Publication number 20230256561
    • Publication date Aug 17, 2023
    • Taiwan Semiconductor Manufacturing company Ltd.
    • CHUNHUNG CHEN
    • B24 - GRINDING POLISHING
  • Information Patent Application

    PAD REMOVAL METHOD AND DEVICE

    • Publication number 20230158791
    • Publication date May 25, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • ChunHung CHEN
    • B24 - GRINDING POLISHING
  • Information Patent Application

    PAD REMOVAL METHOD

    • Publication number 20210229415
    • Publication date Jul 29, 2021
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • ChunHung CHEN
    • B32 - LAYERED PRODUCTS
  • Information Patent Application

    METHOD OF USING POLISHING PAD

    • Publication number 20210069855
    • Publication date Mar 11, 2021
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • ChunHung CHEN
    • B24 - GRINDING POLISHING
  • Information Patent Application

    METHOD FOR CMP PAD CONDITIONING

    • Publication number 20200269384
    • Publication date Aug 27, 2020
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • ChunHung CHEN
    • B24 - GRINDING POLISHING
  • Information Patent Application

    IRREGULAR MECHANICAL MOTION DETECTION SYSTEMS AND METHOD

    • Publication number 20200130130
    • Publication date Apr 30, 2020
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Chunhung Chen
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Performing Planarization Process Controls in Semiconductor Fabrication

    • Publication number 20200051830
    • Publication date Feb 13, 2020
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Chunhung Chen
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    PAD REMOVAL DEVICE AND METHOD

    • Publication number 20190248127
    • Publication date Aug 15, 2019
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • ChunHung CHEN
    • B32 - LAYERED PRODUCTS
  • Information Patent Application

    PERFORMING PLANARIZATION PROCESS CONTROLS IN SEMICONDUCTOR FABRICATION

    • Publication number 20190164777
    • Publication date May 30, 2019
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Chunhung Chen
    • B24 - GRINDING POLISHING
  • Information Patent Application

    APPARATUS AND METHOD FOR CMP PAD CONDITIONING

    • Publication number 20180297170
    • Publication date Oct 18, 2018
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • ChunHung CHEN
    • B24 - GRINDING POLISHING
  • Information Patent Application

    PAD REMOVAL DEVICE AND METHOD

    • Publication number 20180297350
    • Publication date Oct 18, 2018
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • ChunHung CHEN
    • B24 - GRINDING POLISHING
  • Information Patent Application

    POLISHING PAD AND METHOD OF USING

    • Publication number 20180161953
    • Publication date Jun 14, 2018
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • ChunHung CHEN
    • B24 - GRINDING POLISHING
  • Information Patent Application

    CHEMICAL MECHANICAL POLISHING HEAD

    • Publication number 20180009077
    • Publication date Jan 11, 2018
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Jerry Chen
    • B24 - GRINDING POLISHING