Chunlin Luke Zeng

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Singapore, SG

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Patents Grantslast 30 patents

Information Patent Grant
Patterned wafer defect inspection system and method
- Patent number 8,401,272
- Issue date Mar 19, 2013
- ASTI Holdings Limited
- Ajharali Amanullah
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Patterned wafer defect inspection system and method
- Publication number 20090034831
- Publication date Feb 5, 2009
- ASTI Holdings Limited
- Ajharali Amanullah
- G01 - MEASURING TESTING