Chuong T. Huynh

Person

Quincy, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer-tilt determination for slice-and-image process
- Patent number 12,056,865
- Issue date Aug 6, 2024
- Carl Zeiss SMT GmbH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring a sample and microscope implementing the method
- Patent number 11,848,172
- Issue date Dec 19, 2023
- Carl Zeiss SMT GmbH
- Dmitry Klochkov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and methods
- Patent number 10,410,828
- Issue date Sep 10, 2019
- Carl Zeiss Microscopy, LLC
- Chuong Huynh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dummy copper deprocessing
- Patent number 6,863,787
- Issue date Mar 8, 2005
- FEI Company
- Chuong T. Huynh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED ACCURACY
- Publication number 20240331179
- Publication date Oct 3, 2024
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD
- Publication number 20230145897
- Publication date May 11, 2023
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER-TILT DETERMINATION FOR SLICE-AND-IMAGE PROCESS
- Publication number 20230115376
- Publication date Apr 13, 2023
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER
- Publication number 20220392793
- Publication date Dec 8, 2022
- Carl Zeiss SMT GMBH
- Alex Buxbaum
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHODS
- Publication number 20190189392
- Publication date Jun 20, 2019
- Carl Zeiss Microscopy, LLC
- Chuong Huynh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHODS
- Publication number 20160203948
- Publication date Jul 14, 2016
- Carl Zeiss Microscopy, LLC
- Chuong Huynh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dummy copper deprocessing
- Publication number 20040203249
- Publication date Oct 14, 2004
- Chuong T. Huynh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Chuong T. Huynh

Person

Patents Grantslast 30 patents

Wafer-tilt determination for slice-and-image process

Method for measuring a sample and microscope implementing the method

Charged particle beam system and methods

Dummy copper deprocessing

Patents Applicationslast 30 patents

3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED ACCURACY

METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD

WAFER-TILT DETERMINATION FOR SLICE-AND-IMAGE PROCESS

METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER

CHARGED PARTICLE BEAM SYSTEM AND METHODS

CHARGED PARTICLE BEAM SYSTEM AND METHODS

Dummy copper deprocessing