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Patents Grants
last 30 patents
Information
Patent Grant
Magnetic levitation reaction sphere
Patent number
10,532,832
Issue date
Jan 14, 2020
Tsinghua University
Ming Zhang
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Six-degree-of-freedom displacement measurement method for exposure...
Patent number
9,995,569
Issue date
Jun 12, 2018
Tsinghua University
Yu Zhu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical grating phase modulator for laser interference photoetching...
Patent number
9,869,857
Issue date
Jan 16, 2018
Tsinghua University
Yu Zhu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Planar motor rotor displacement measuring device and its measuring...
Patent number
9,766,054
Issue date
Sep 19, 2017
Shanghai Micro Electronics Equipment Co., Ltd.
Jinchun Hu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Negative stiffness system for gravity compensation of micropositioner
Patent number
9,752,643
Issue date
Sep 5, 2017
Shanghai Micro Electronics Equipment Co., Ltd.
Yu Zhu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MAGNETIC LEVITATION REACTION SPHERE
Publication number
20180170581
Publication date
Jun 21, 2018
TSINGHUA UNIVERSITY
Ming ZHANG
G05 - CONTROLLING REGULATING
Information
Patent Application
SIX-DEGREE-OF-FREEDOM DISPLACEMENT MEASUREMENT METHOD FOR EXPOSURE...
Publication number
20180080757
Publication date
Mar 22, 2018
TSINGHUA UNIVERSITY
Yu Zhu
G01 - MEASURING TESTING
Information
Patent Application
NEGATIVE STIFFNESS SYSTEM FOR GRAVITY COMPENSATION OF MICROPOSITIONER
Publication number
20150369331
Publication date
Dec 24, 2015
SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
Yu ZHU
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
OPTICAL GRATING PHASE MODULATOR FOR LASER INTERFERENCE PHOTOETCHING...
Publication number
20150362723
Publication date
Dec 17, 2015
TSINGHUA UNIVERSITY
Yu Zhu
G02 - OPTICS
Information
Patent Application
PLANAR MOTOR ROTOR DISPLACEMENT MEASURING DEVICE AND ITS MEASURING...
Publication number
20150012242
Publication date
Jan 8, 2015
SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
Jinchun Hu
G01 - MEASURING TESTING