Cindy Wailam Chen

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Etch back process approach in dual source plasma reactors
- Patent number 7,160,813
- Issue date Jan 9, 2007
- Novellus Systems, Inc.
- Cindy W. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for post polysilicon etch photoresist and polymer removal w...
- Patent number 6,955,177
- Issue date Oct 18, 2005
- Novellus Systems, Inc.
- Eddie Chiu
- B08 - CLEANING