Claudia EKSTEIN

Person

Ellwangen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate for an EUV-lithography mirror
- Patent number 10,935,704
- Issue date Mar 2, 2021
- Carl Zeiss SMT GmbH
- Claudia Ekstein
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Method and device for connecting an optical element to a frame
- Patent number 9,604,299
- Issue date Mar 28, 2017
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate for mirrors for EUV lithography
- Patent number 8,976,927
- Issue date Mar 10, 2015
- Carl Zeiss SMT GmbH
- Claudia Ekstein
- G02 - OPTICS
Information Patent Grant
Method and device for connecting an optical element to a frame
- Patent number 8,705,006
- Issue date Apr 22, 2014
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Composite structure for microlithography and optical arrangement
- Patent number 7,816,022
- Issue date Oct 19, 2010
- Carl Zeiss SMT AG
- Claudia Ekstein
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE FOR AN EUV-LITHOGRAPHY MIRROR
- Publication number 20210149093
- Publication date May 20, 2021
- Carl Zeiss SMT GMBH
- Claudia EKSTEIN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
SUBSTRATE FOR AN EUV-LITHOGRAPHY MIRROR
- Publication number 20170160447
- Publication date Jun 8, 2017
- Carl Zeiss SMT GMBH
- Claudia EKSTEIN
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME
- Publication number 20150008215
- Publication date Jan 8, 2015
- Carl Zeiss SMT GMBH
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE FOR AN EUV-LITHOGRAPHY MIRROR
- Publication number 20130301151
- Publication date Nov 14, 2013
- Claudia EKSTEIN
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
SUBSTRATE FOR MIRRORS FOR EUV LITHOGRAPHY
- Publication number 20130170056
- Publication date Jul 4, 2013
- Carl Zeiss SMT GMBH
- Claudia EKSTEIN
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME
- Publication number 20090244508
- Publication date Oct 1, 2009
- Carl Zeiss SMT AG
- Armin Schoeppach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
COMPOSITE STRUCTURE FOR MICROLITHOGRAPHY AND OPTICAL ARRANGEMENT
- Publication number 20090142615
- Publication date Jun 4, 2009
- Carl Zeiss SMT AG
- Claudia EKSTEIN
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
ARRANGEMENT OF TWO CONNECTED BODIES
- Publication number 20080100815
- Publication date May 1, 2008
- Carl Zeiss SMT AG
- Hubert Holderer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Support structure for temporarily supporting a substrate
- Publication number 20070285647
- Publication date Dec 13, 2007
- Carl Zeiss SMT AG
- Yim-Bun Patrick Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Claudia EKSTEIN

Person

Patents Grantslast 30 patents

Substrate for an EUV-lithography mirror

Method and device for connecting an optical element to a frame

Substrate for mirrors for EUV lithography

Method and device for connecting an optical element to a frame

Composite structure for microlithography and optical arrangement

Patents Applicationslast 30 patents

SUBSTRATE FOR AN EUV-LITHOGRAPHY MIRROR

SUBSTRATE FOR AN EUV-LITHOGRAPHY MIRROR

METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME

SUBSTRATE FOR AN EUV-LITHOGRAPHY MIRROR

SUBSTRATE FOR MIRRORS FOR EUV LITHOGRAPHY

METHOD AND DEVICE FOR CONNECTING AN OPTICAL ELEMENT TO A FRAME

COMPOSITE STRUCTURE FOR MICROLITHOGRAPHY AND OPTICAL ARRANGEMENT

ARRANGEMENT OF TWO CONNECTED BODIES

Support structure for temporarily supporting a substrate