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Radebeul, DE
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last 30 patents
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Patent Grant
Methods of controlling the etching of silicon nitride relative to s...
Patent number
8,580,133
Issue date
Nov 12, 2013
GLOBALFOUNDRIES Inc.
Berthold Reimer
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Methods of Controlling the Etching of Silicon Nitride Relative to S...
Publication number
20130122716
Publication date
May 16, 2013
GLOBALFOUNDRIES INC.
Berthold Reimer
H01 - BASIC ELECTRIC ELEMENTS