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Claudiu Valentin Puha
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Aloha, OR, US
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Patents Grants
last 30 patents
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Patent Grant
Wafer chuck assembly
Patent number
11,508,609
Issue date
Nov 22, 2022
Lam Research Corporation
Aaron Louis LaBrie
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Wafer chuck assembly
Patent number
10,811,299
Issue date
Oct 20, 2020
Lam Research Corporation
Aaron Louis LaBrie
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
DETECTING WAFER STATUS IN A WAFER CHUCK ASSEMBLY
Publication number
20210183684
Publication date
Jun 17, 2021
LAM RESEARCH CORPORATION
Aaron Louis LaBrie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CHUCK ASSEMBLY
Publication number
20200411358
Publication date
Dec 31, 2020
LAM RESEARCH CORPORATION
Aaron Louis LaBrie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CHUCK ASSEMBLY
Publication number
20190341290
Publication date
Nov 7, 2019
LAM RESEARCH CORPORATION
Aaron Louis LaBrie
H01 - BASIC ELECTRIC ELEMENTS