Claus Schneider

Person

Mohrendorf, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Particle measurement configuration and semiconductor wafer processi...
- Patent number 7,000,454
- Issue date Feb 21, 2006
- Infineon Technologies AG
- Claus Schneider
- B08 - CLEANING
Information Patent Grant
Method and device for optically monitoring fabrication processes of...
- Patent number 7,003,149
- Issue date Feb 21, 2006
- Semiconductor 300 GmbH & Co. KG
- Norbert Benesch
- G01 - MEASURING TESTING
Information Patent Grant
Configuration for determining a concentration of contaminating part...
- Patent number 6,928,892
- Issue date Aug 16, 2005
- Infineon Technologies AG
- Olaf Storbeck
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for monitoring intentional or unavoidable layer depositio...
- Patent number 6,784,445
- Issue date Aug 31, 2004
- raunhofer-Gesellschaft zur Foederung der Angewandten Forschung E.V.
- Jürgen Ziegler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for rapidly measuring angle-dependent diffraction effects...
- Patent number 6,724,475
- Issue date Apr 20, 2004
- Infineon Technologies AG
- Norbert Benesch
- G01 - MEASURING TESTING
Information Patent Grant
Quality surveillance of a production process
- Patent number 6,622,101
- Issue date Sep 16, 2003
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Richard Oechsner
- G07 - CHECKING-DEVICES
Information Patent Grant
Ellipsometer
- Patent number 5,343,293
- Issue date Aug 30, 1994
- Fraunhofer-Gesellschaft zur Forderung der angewandten
- Rudolf Berger
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Configuration for determining a concentration of contaminating part...
- Publication number 20030047012
- Publication date Mar 13, 2003
- Olaf Storbeck
- G01 - MEASURING TESTING
Information Patent Application
Particle measurement configuration and semiconductor wafer processi...
- Publication number 20030041969
- Publication date Mar 6, 2003
- Claus Schneider
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for rapidly measuring angle-dependent diffraction effects...
- Publication number 20020101585
- Publication date Aug 1, 2002
- Norbert Benesch
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for monitoring intentional or unavoidable layer depositio...
- Publication number 20020089677
- Publication date Jul 11, 2002
- Jurgen Ziegler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and device for optically monitoring fabrication processes of...
- Publication number 20020051564
- Publication date May 2, 2002
- Norbert Benesch
- G01 - MEASURING TESTING

Claus Schneider

Person

Patents Grantslast 30 patents

Particle measurement configuration and semiconductor wafer processi...

Method and device for optically monitoring fabrication processes of...

Configuration for determining a concentration of contaminating part...

Apparatus for monitoring intentional or unavoidable layer depositio...

Apparatus for rapidly measuring angle-dependent diffraction effects...

Quality surveillance of a production process

Ellipsometer

Patents Applicationslast 30 patents

Configuration for determining a concentration of contaminating part...

Particle measurement configuration and semiconductor wafer processi...

Apparatus for rapidly measuring angle-dependent diffraction effects...

Apparatus for monitoring intentional or unavoidable layer depositio...

Method and device for optically monitoring fabrication processes of...