Claus Zahlten

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Heidelberg, DE

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Patents Grantslast 30 patents

Information Patent Grant
Imaging optics and projection exposure installation for microlithog...
- Patent number 9,057,964
- Issue date Jun 16, 2015
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
IMAGING OPTICS AND PROJECTION EXPOSURE INSTALLATION FOR MICROLITHOG...
- Publication number 20120069315
- Publication date Mar 22, 2012
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS