Clemens Utzny

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Shape metrology for photomasks
- Patent number 9,405,185
- Issue date Aug 2, 2016
- Advanced Mask Technology Center GmbH & Co. KG
- Clemens Utzny
- G01 - MEASURING TESTING
Information Patent Grant
EUV mask set and methods of manufacturing EUV masks and integrated...
- Patent number 8,932,785
- Issue date Jan 13, 2015
- Advanced Mask Technology Center GmbH & Co. KG
- Clemens Utzny
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EUV MASK SET AND METHODS OF MANUFACTURING EUV MASKS AND INTEGRATED...
- Publication number 20140106263
- Publication date Apr 17, 2014
- Advanced Mask Technology Center GmbH & Co. KG
- Clemens Utzny
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY