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Clifford Berry
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West Linn, OR, US
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Patents Grants
last 30 patents
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Patent Grant
Monitoring surface oxide on seed layers during electroplating
Patent number
11,208,732
Issue date
Dec 28, 2021
Lam Research Corporation
Ludan Huang
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Monitoring surface oxide on seed layers during electroplating
Patent number
10,443,146
Issue date
Oct 15, 2019
Lam Research Corporation
Ludan Huang
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Pulse sequence for plating on thin seed layers
Patent number
8,500,983
Issue date
Aug 6, 2013
Novellus Systems, Inc.
Thomas A. Ponnuswamy
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Patents Applications
last 30 patents
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Patent Application
MONITORING SURFACE OXIDE ON SEED LAYERS DURING ELECTROPLATING
Publication number
20190390361
Publication date
Dec 26, 2019
LAM RESEARCH CORPORATION
Ludan Huang
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
MONITORING SURFACE OXIDE ON SEED LAYERS DURING ELECTROPLATING
Publication number
20180282894
Publication date
Oct 4, 2018
LAM RESEARCH CORPORATION
Ludan Huang
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
PULSE SEQUENCE FOR PLATING ON THIN SEED LAYERS
Publication number
20100300888
Publication date
Dec 2, 2010
Thomas A. Ponnuswamy
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR