Cobby Lee

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Hsinchu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method for cleaning interior of etching chamber
- Patent number 6,401,728
- Issue date Jun 11, 2002
- United Microelectronics Corp.
- Yu-Chang Chow
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CLEANING INTERIOR OF ETCHING CHAMBER
- Publication number 20010052350
- Publication date Dec 20, 2001
- YU-CHANG CHOW
- H01 - BASIC ELECTRIC ELEMENTS