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Cody Barnett
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Portland, OR, US
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last 30 patents
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Patent Grant
Systems and methods for reducing backside deposition and mitigating...
Patent number
9,852,901
Issue date
Dec 26, 2017
Lam Research Corporation
Sesha Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for reducing backside deposition and mitigating...
Patent number
9,460,915
Issue date
Oct 4, 2016
Lam Research Corporation
Sesha Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ceramic showerhead with embedded RF electrode for capacitively coup...
Patent number
9,449,795
Issue date
Sep 20, 2016
Novellus Systems, Inc.
Mohamed Sabri
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATING...
Publication number
20160372318
Publication date
Dec 22, 2016
LAM RESEARCH CORPORATION
Sesha Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATING...
Publication number
20160079057
Publication date
Mar 17, 2016
LAM RESEARCH CORPORATION
Sesha Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUSES FOR STABLE DEPOSITION RATE CONTROL IN LOW T...
Publication number
20160056032
Publication date
Feb 25, 2016
LAM RESEARCH CORPORATION
Chloe Baldasseroni
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUP...
Publication number
20140238608
Publication date
Aug 28, 2014
Novellus Systems, Inc.
Mohamed Sabri
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...