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Colin F. Smith
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Half Moon Bay, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Anti-transient showerhead
Patent number
10,494,717
Issue date
Dec 3, 2019
Lam Research Corporation
Edward Sung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Configurable liquid precursor vaporizer
Patent number
10,107,490
Issue date
Oct 23, 2018
Lam Research Corporation
Colin F. Smith
F22 - STEAM GENERATION
Information
Patent Grant
Anti-transient showerhead
Patent number
10,023,959
Issue date
Jul 17, 2018
Lam Research Corporation
Edward Sung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Modular vaporizer
Patent number
9,982,341
Issue date
May 29, 2018
Lam Research Corporation
Alan M. Schoepp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Internally heated porous filter for defect reduction with liquid or...
Patent number
9,863,041
Issue date
Jan 9, 2018
Lam Research Corporation
Colin F. Smith
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma suppression behind a showerhead through the use of increased...
Patent number
9,758,868
Issue date
Sep 12, 2017
Lam Research Corporation
Patrick Girard Breiling
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for pressure-based liquid flow control
Patent number
9,605,346
Issue date
Mar 28, 2017
Lam Research Corporation
Colin F. Smith
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for cooling and removing reactants from a subst...
Patent number
9,453,614
Issue date
Sep 27, 2016
Lam Research Corporation
Colin F. Smith
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Grant
Utilization of an air amplifier to remove sheets of paper from glas...
Patent number
8,690,148
Issue date
Apr 8, 2014
Hanergy Holding Group Ltd.
Colin F. Smith
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Deposition sub-chamber with variable flow
Patent number
7,993,457
Issue date
Aug 9, 2011
Novellus Systems, Inc.
Peter Krotov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dual seal deposition process chamber and process
Patent number
7,737,035
Issue date
Jun 15, 2010
Novellus Systems, Inc.
Gary Lind
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mixing of materials in an integrated circuit manufacturing equipment
Patent number
6,758,591
Issue date
Jul 6, 2004
Novellus Systems, Inc.
Peter Krotov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ANTI-TRANSIENT SHOWERHEAD
Publication number
20180340256
Publication date
Nov 29, 2018
Lam Research Corporation
Edward Sung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA SUPPRESSION BEHIND A SHOWERHEAD THROUGH THE USE OF INCREASED...
Publication number
20170260627
Publication date
Sep 14, 2017
LAM RESEARCH CORPORATION
Patrick Girard Breiling
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ANTI-TRANSIENT SHOWERHEAD
Publication number
20160348242
Publication date
Dec 1, 2016
LAM RESEARCH CORPORATION
Edward Sung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MODULAR VAPORIZER
Publication number
20160222508
Publication date
Aug 4, 2016
LAM RESEARCH CORPORATION
Alan M. Schoepp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INTERNALLY HEATED POROUS FILTER FOR DEFECT REDUCTION WITH LIQUID OR...
Publication number
20160102398
Publication date
Apr 14, 2016
LAM RESEARCH CORPORATION
Colin F. Smith
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONFIGURABLE LIQUID PRECURSOR VAPORIZER
Publication number
20150377481
Publication date
Dec 31, 2015
LAM RESEARCH CORPORATION
Colin F. Smith
F22 - STEAM GENERATION
Information
Patent Application
SYSTEMS AND METHODS FOR PRESSURE-BASED LIQUID FLOW CONTROL
Publication number
20150275358
Publication date
Oct 1, 2015
LAM RESEARCH CORPORATION
Colin F. Smith
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR COOLING AND REMOVING REACTANTS FROM A SUBST...
Publication number
20150260350
Publication date
Sep 17, 2015
LAM RESEARCH CORPORATION
Colin F. Smith
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS