Conan Chiang

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Los Altos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for the deposition of a conformal film on a substrate and...
- Patent number 9,384,979
- Issue date Jul 5, 2016
- Lam Research Corporation
- Dae-Han Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pitch reduction using oxide spacer
- Patent number 8,592,318
- Issue date Nov 26, 2013
- Lam Research Corporation
- Jisoo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for the deposition of a conformal film on a substrate and...
- Patent number 8,357,434
- Issue date Jan 22, 2013
- Lam Research Corporation
- Dae-han Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for detecting planarization of metal films pri...
- Patent number 7,690,966
- Issue date Apr 6, 2010
- Lam Research Corporation
- Ramesh Gopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removable spacer
- Patent number 7,476,610
- Issue date Jan 13, 2009
- Lam Research Corporation
- Ji Soo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for detecting planarization of metal films pri...
- Patent number 7,413,988
- Issue date Aug 19, 2008
- Lam Research Corporation
- Ramesh Gopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plasma etching organic antireflective coating
- Patent number 6,617,257
- Issue date Sep 9, 2003
- Lam Research Corporation
- Tuqiang Ni
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
FLAT BOTTOM SHADOW RING
- Publication number 20230223292
- Publication date Jul 13, 2023
- LAM RESEARCH CORPORATION
- Lai Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR THE DEPOSITION OF A CONFORMAL FILM ON A SUBSTRATE AND...
- Publication number 20130074769
- Publication date Mar 28, 2013
- LAM RESEARCH CORPORATION
- Dae-Han CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PITCH REDUCTION USING OXIDE SPACER
- Publication number 20120052683
- Publication date Mar 1, 2012
- LAM RESEARCH CORPORATION
- Jisoo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Removable spacer
- Publication number 20080111166
- Publication date May 15, 2008
- Lam Research Corporation
- Ji Soo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reducing line edge roughness
- Publication number 20070181530
- Publication date Aug 9, 2007
- Lam Research Corporation
- Zhi-Song Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of plasma etching organic antireflective coating
- Publication number 20020182881
- Publication date Dec 5, 2002
- Tuqiang Ni
- B81 - MICRO-STRUCTURAL TECHNOLOGY