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San Jose, CA, US
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last 30 patents
Information
Patent Grant
Charged particle beam substrate inspection using both vector and ra...
Patent number
9,620,332
Issue date
Apr 11, 2017
Multibeam Corporation
David K. Lam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam substrate inspection using both vector and ra...
Patent number
9,466,463
Issue date
Oct 11, 2016
Multibeam Corporation
David K. Lam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic optimization of etch process for accelerated yield ramp w...
Patent number
9,207,539
Issue date
Dec 8, 2015
Multibeam Corporation
David K. Lam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Matched multiple charged particle beam systems for lithographic pat...
Patent number
9,184,027
Issue date
Nov 10, 2015
Multibeam Corporation
David K. Lam
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Matched multiple charged particle beam systems for lithographic pat...
Patent number
8,999,627
Issue date
Apr 7, 2015
Multibeam Corporation
David K. Lam
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Automatic optimization of etch process for accelerated yield ramp w...
Patent number
8,999,628
Issue date
Apr 7, 2015
Multibeam Corporation
David K. Lam
G06 - COMPUTING CALCULATING COUNTING