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Conor O'Carroll
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Vancouver, CA
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last 30 patents
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Patent Grant
Method and system for thermally processing a plurality of wafer-sha...
Patent number
7,977,258
Issue date
Jul 12, 2011
Mattson Technology, Inc.
Zsolt Nenyei
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method and system for thermally processing a plurality of wafer-sha...
Publication number
20080248657
Publication date
Oct 9, 2008
Zsolt Nenyei
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Device and method for the reduction of particles in the thermal tre...
Publication number
20070098904
Publication date
May 3, 2007
Helmut Aschner
H01 - BASIC ELECTRIC ELEMENTS