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Conrad Wolke
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Aalen, DE
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last 30 patents
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Patent Application
OPTICAL COMPONENT AND OPTICAL SYSTEM, IN PARTICULAR FOR MICROLITHOG...
Publication number
20230384687
Publication date
Nov 30, 2023
Carl Zeiss SMT GMBH
Jeffrey Erxmeyer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
OPTICAL SYSTEM, IN PARTICULAR FOR MICROLITHOGRAPHY, AND METHOD FOR...
Publication number
20230314959
Publication date
Oct 5, 2023
Carl Zeiss SMT GMBH
Conrad Wolke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY