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Constant Paul Marie Jozef Baggen
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Venlo Blerick, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,014,881
Issue date
Sep 6, 2011
ASML Netherlands B.V.
Mark Constant Johannes Baggen
G05 - CONTROLLING REGULATING
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last 30 patents
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Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080200998
Publication date
Aug 21, 2008
ASML NETHERLANDS B.V.
Mark Constant Johannes Baggen
G05 - CONTROLLING REGULATING