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Corey Collard
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San Jose, CA, US
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last 30 patents
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Patent Grant
Cluster tool with integrated metrology chamber for transparent subs...
Patent number
7,846,848
Issue date
Dec 7, 2010
Applied Materials, Inc.
Richard Lewington
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
CLUSTER TOOL WITH INTEGRATED METROLOGY CHAMBER FOR TRANSPARENT SUBS...
Publication number
20070012660
Publication date
Jan 18, 2007
Richard Lewington
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Integrated metrology chamber for transparent substrates
Publication number
20060154388
Publication date
Jul 13, 2006
Richard Lewington
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY