Coriolan Frum

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Los Gatos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Interferometric endpoint detection in a substrate etching process
- Patent number 6,905,624
- Issue date Jun 14, 2005
- Applied Materials, Inc.
- Coriolan I. Frum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monitoring substrate processing with optical emission and polarized...
- Patent number 6,559,942
- Issue date May 6, 2003
- Applied Materials Inc.
- Zhifeng Sui
- G01 - MEASURING TESTING
Information Patent Grant
Motor driven tuning and matching of RF coils in an NMR probe
- Patent number 6,323,647
- Issue date Nov 27, 2001
- Varian, Inc.
- Weston A. Anderson
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Interferometric endpoint detection in a substrate etching process
- Publication number 20050006341
- Publication date Jan 13, 2005
- APPLIED MATERIALS, INC.
- Coriolan I. Frum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Monitoring substrate processing with optical emission and polarized...
- Publication number 20020048019
- Publication date Apr 25, 2002
- Zhifeng Sui
- G01 - MEASURING TESTING