Cornelius Richt

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Drive device, optical system and lithography apparatus
- Patent number 12,153,353
- Issue date Nov 26, 2024
- Carl Zeiss SMT GmbH
- Oliver Herbst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Modulation device, control device, optical system, lithography syst...
- Patent number 11,901,948
- Issue date Feb 13, 2024
- Carl Zeiss SMT GmbH
- Cornelius Richt
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
CONTROL DEVICE, OPTICAL SYSTEM, LITHOGRAPHY INSTALLATION AND METHOD
- Publication number 20250021011
- Publication date Jan 16, 2025
- Carl Zeiss SMT GMBH
- Cornelius Richt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20250015772
- Publication date Jan 9, 2025
- Carl Zeiss SMT GMBH
- Cornelius Richt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20230051439
- Publication date Feb 16, 2023
- Carl Zeiss SMT GMBH
- Oliver Herbst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MODULATION DEVICE, CONTROL DEVICE, OPTICAL SYSTEM, LITHOGRAPHY SYST...
- Publication number 20220149950
- Publication date May 12, 2022
- Carl Zeiss SMT GMBH
- Cornelius Richt
- H03 - BASIC ELECTRONIC CIRCUITRY