Costel Biloiu

Person

Rockport, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Resonator, linear accelerator configuration and ion implantation sy...
- Patent number 12,144,101
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Costel Biloiu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and system including high angle extraction optics
- Patent number 11,948,781
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Christopher Campbell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF quadrupole particle accelerator
- Patent number 11,818,830
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonator, linear accelerator configuration and ion implantation sy...
- Patent number 11,812,539
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Costel Biloiu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Resonator coil having an asymmetrical profile
- Patent number 11,710,617
- Issue date Jul 25, 2023
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonator, linear accelerator configuration and ion implantation sy...
- Patent number 11,596,051
- Issue date Feb 28, 2023
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme edge uniformity control
- Patent number 11,574,800
- Issue date Feb 7, 2023
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tunable extraction assembly for wide angle ion beam
- Patent number 11,495,430
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Jay R. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transparent halo assembly for reduced particle generation
- Patent number 11,424,112
- Issue date Aug 23, 2022
- Varian Semiconductor Equipment Associates, Inc.
- Ernest E. Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and system including high angle extraction optics
- Patent number 11,361,935
- Issue date Jun 14, 2022
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and system including extraction optics having movable blo...
- Patent number 11,270,864
- Issue date Mar 8, 2022
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for forming surface relief gratings
- Patent number 11,226,439
- Issue date Jan 18, 2022
- Applied Materials, Inc.
- Joseph C. Olson
- G02 - OPTICS
Information Patent Grant
Extraction apparatus and system for high throughput ion beam proces...
- Patent number 11,127,556
- Issue date Sep 21, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonator coil having an asymmetrical profile
- Patent number 11,094,504
- Issue date Aug 17, 2021
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and system having extraction assembly for wide angle ion...
- Patent number 11,056,319
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, system and techniques for mass analyzed ion beam
- Patent number 10,763,072
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for differential in situ cleaning
- Patent number 10,730,082
- Issue date Aug 4, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Glen F R Gilchrist
- B08 - CLEANING
Information Patent Grant
Extreme edge uniformity control
- Patent number 10,665,433
- Issue date May 26, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,600,616
- Issue date Mar 24, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Extraction apparatus and system for high throughput ion beam proces...
- Patent number 10,468,226
- Issue date Nov 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transparent halo for reduced particle generation
- Patent number 10,395,969
- Issue date Aug 27, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radio frequency extraction system for charge neutralized ion beam
- Patent number 10,224,181
- Issue date Mar 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrodynamic mass analysis
- Patent number 10,192,727
- Issue date Jan 29, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,128,082
- Issue date Nov 13, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled RF plasma source with magnetic confinement and...
- Patent number 10,049,861
- Issue date Aug 14, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,004,133
- Issue date Jun 19, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 9,706,634
- Issue date Jul 11, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ control of ion angular distribution in a processing apparatus
- Patent number 9,620,335
- Issue date Apr 11, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of ion angular distribution of ion beams with hidden deflec...
- Patent number 9,514,912
- Issue date Dec 6, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gallium ION source and materials therefore
- Patent number 9,396,902
- Issue date Jul 19, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION EXTRACTION OPTICS HAVING NON UNIFORM GRID ASSEMBLY
- Publication number 20240412956
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Costel BILOIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION EXTRACTION OPTICS HAVING NOVEL BLOCKER CONFIGURATION
- Publication number 20240194438
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED PLASMA APPARATUS WITH NOVEL FARADAY SHIELD
- Publication number 20240128052
- Publication date Apr 18, 2024
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESONATOR, LINEAR ACCELERATOR CONFIGURATION AND ION IMPLANTATION SY...
- Publication number 20240032183
- Publication date Jan 25, 2024
- Applied Materials, Inc.
- Costel Biloiu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
RESONATOR, LINEAR ACCELERATOR CONFIGURATION AND ION IMPLANTATION SY...
- Publication number 20230124350
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Costel Biloiu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
COMPACT LOW ANGLE ION BEAM EXTRACTION ASSEMBLY AND PROCESSING APPAR...
- Publication number 20230124509
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF QUADRUPOLE PARTICLE ACCELERATOR
- Publication number 20220248523
- Publication date Aug 4, 2022
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESONATOR, LINEAR ACCELERATOR CONFIGURATION AND ION IMPLANTATION SY...
- Publication number 20220174810
- Publication date Jun 2, 2022
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND SYSTEM INCLUDING HIGH ANGLE EXTRACTION OPTICS
- Publication number 20220148843
- Publication date May 12, 2022
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE EXTRACTION ASSEMBLY FOR WIDE ANGLE ION BEAM
- Publication number 20220020557
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Jay R. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND SYSTEM INCLUDING HIGH ANGLE EXTRACTION OPTICS
- Publication number 20210391155
- Publication date Dec 16, 2021
- Applied Materials, Inc.
- Christopher Campbell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESONATOR COIL HAVING AN ASYMMETRICAL PROFILE
- Publication number 20210343500
- Publication date Nov 4, 2021
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND SYSTEM INCLUDING EXTRACTION OPTICS HAVING MOVABLE BLO...
- Publication number 20210305001
- Publication date Sep 30, 2021
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESONATOR COIL HAVING AN ASYMMETRICAL PROFILE
- Publication number 20210210307
- Publication date Jul 8, 2021
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND SYSTEM HAVING EXTRACTION ASSEMBLY FOR WIDE ANGLE ION...
- Publication number 20210035779
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM
- Publication number 20200294755
- Publication date Sep 17, 2020
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Extreme Edge Uniformity Control
- Publication number 20200243308
- Publication date Jul 30, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR FORMING SURFACE RELIEF GRATINGS
- Publication number 20200150325
- Publication date May 14, 2020
- Applied Materials, Inc.
- Joseph C. Olson
- G02 - OPTICS
Information Patent Application
Extraction Apparatus and System for High Throughput Ion Beam Proces...
- Publication number 20200098540
- Publication date Mar 26, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPARENT HALO FOR REDUCED PARTICLE GENERATION
- Publication number 20190139774
- Publication date May 9, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPARENT HALO ASSEMBLY FOR REDUCED PARTICLE GENERATION
- Publication number 20190139758
- Publication date May 9, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Ernest E. Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20190006149
- Publication date Jan 3, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrodynamic Mass Analysis
- Publication number 20180286653
- Publication date Oct 4, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus And Method For Differential In Situ Cleaning
- Publication number 20180111171
- Publication date Apr 26, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Glen FR Gilchrist
- B08 - CLEANING
Information Patent Application
Extreme Edge Uniformity Control
- Publication number 20180082824
- Publication date Mar 22, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170311430
- Publication date Oct 26, 2017
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIO FREQUENCY EXTRACTION SYSTEM FOR CHARGE NEUTRALIZED ION BEAM
- Publication number 20170309453
- Publication date Oct 26, 2017
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170042010
- Publication date Feb 9, 2017
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170025252
- Publication date Jan 26, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN SITU CONTROL OF ION ANGULAR DISTRIBUTION IN A PROCESSING APPARATUS
- Publication number 20160189935
- Publication date Jun 30, 2016
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS

Costel Biloiu

Person

Patents Grantslast 30 patents

Resonator, linear accelerator configuration and ion implantation sy...

Apparatus and system including high angle extraction optics

RF quadrupole particle accelerator

Resonator, linear accelerator configuration and ion implantation sy...

Resonator coil having an asymmetrical profile

Resonator, linear accelerator configuration and ion implantation sy...

Extreme edge uniformity control

Tunable extraction assembly for wide angle ion beam

Transparent halo assembly for reduced particle generation

Apparatus and system including high angle extraction optics

Apparatus and system including extraction optics having movable blo...

System and method for forming surface relief gratings

Extraction apparatus and system for high throughput ion beam proces...

Resonator coil having an asymmetrical profile

Apparatus and system having extraction assembly for wide angle ion...

Apparatus, system and techniques for mass analyzed ion beam

Apparatus and method for differential in situ cleaning

Extreme edge uniformity control

Apparatus and techniques to treat substrates using directional plas...

Extraction apparatus and system for high throughput ion beam proces...

Transparent halo for reduced particle generation

Radio frequency extraction system for charge neutralized ion beam

Electrodynamic mass analysis

Apparatus and techniques to treat substrates using directional plas...

Inductively coupled RF plasma source with magnetic confinement and...

Apparatus and techniques to treat substrates using directional plas...

Apparatus and techniques to treat substrates using directional plas...

In situ control of ion angular distribution in a processing apparatus

Control of ion angular distribution of ion beams with hidden deflec...

Gallium ION source and materials therefore

Patents Applicationslast 30 patents

ION EXTRACTION OPTICS HAVING NON UNIFORM GRID ASSEMBLY

ION EXTRACTION OPTICS HAVING NOVEL BLOCKER CONFIGURATION

INDUCTIVELY COUPLED PLASMA APPARATUS WITH NOVEL FARADAY SHIELD

RESONATOR, LINEAR ACCELERATOR CONFIGURATION AND ION IMPLANTATION SY...

RESONATOR, LINEAR ACCELERATOR CONFIGURATION AND ION IMPLANTATION SY...

COMPACT LOW ANGLE ION BEAM EXTRACTION ASSEMBLY AND PROCESSING APPAR...

RF QUADRUPOLE PARTICLE ACCELERATOR

RESONATOR, LINEAR ACCELERATOR CONFIGURATION AND ION IMPLANTATION SY...

APPARATUS AND SYSTEM INCLUDING HIGH ANGLE EXTRACTION OPTICS

TUNABLE EXTRACTION ASSEMBLY FOR WIDE ANGLE ION BEAM

APPARATUS AND SYSTEM INCLUDING HIGH ANGLE EXTRACTION OPTICS

RESONATOR COIL HAVING AN ASYMMETRICAL PROFILE

APPARATUS AND SYSTEM INCLUDING EXTRACTION OPTICS HAVING MOVABLE BLO...

RESONATOR COIL HAVING AN ASYMMETRICAL PROFILE

APPARATUS AND SYSTEM HAVING EXTRACTION ASSEMBLY FOR WIDE ANGLE ION...

APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

Extreme Edge Uniformity Control

SYSTEM AND METHOD FOR FORMING SURFACE RELIEF GRATINGS

Extraction Apparatus and System for High Throughput Ion Beam Proces...

TRANSPARENT HALO FOR REDUCED PARTICLE GENERATION

TRANSPARENT HALO ASSEMBLY FOR REDUCED PARTICLE GENERATION

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

Electrodynamic Mass Analysis

Apparatus And Method For Differential In Situ Cleaning

Extreme Edge Uniformity Control

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

RADIO FREQUENCY EXTRACTION SYSTEM FOR CHARGE NEUTRALIZED ION BEAM

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

IN SITU CONTROL OF ION ANGULAR DISTRIBUTION IN A PROCESSING APPARATUS