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Craig Higgins
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Cedar Park, TX, US
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last 30 patents
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Patent Application
METHOD TO CALIBRATE, PREDICT, AND CONTROL STOCHASTIC DEFECTS IN EUV...
Publication number
20250104216
Publication date
Mar 27, 2025
KLA Corporation
Pradeep Vukkadala
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
METHOD TO CALIBRATE, PREDICT, AND CONTROL STOCHASTIC DEFECTS IN EUV...
Publication number
20250104214
Publication date
Mar 27, 2025
KLA Corporation
Pradeep Vukkadala
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
METHOD TO CALIBRATE, PREDICT, AND CONTROL STOCHASTIC DEFECTS IN EUV...
Publication number
20250104215
Publication date
Mar 27, 2025
KLA Corporation
Pradeep Vukkadala
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
PREDICTION AND METROLOGY OF STOCHASTIC PHOTORESIST THICKNESS DEFECTS
Publication number
20220129775
Publication date
Apr 28, 2022
KLA Corporation
Anatoly Burov
G06 - COMPUTING CALCULATING COUNTING