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KATY, TX, US
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Patents Grants
last 30 patents
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Patent Grant
Automated calibration methodology for VUV metrology system
Patent number
8,153,987
Issue date
Apr 10, 2012
Jordan Valley Semiconductors Ltd.
Jeffrey B. Hurst
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Automated calibration methodology for VUV metrology system
Publication number
20100294922
Publication date
Nov 25, 2010
JEFFREY B. HURST
G01 - MEASURING TESTING