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Cristian Siladie
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Castro Valley, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Variable depth edge ring for etch uniformity control
Patent number
11,342,163
Issue date
May 24, 2022
Lam Research Corporation
Ivelin Angelov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing chamber including multiple gas injection point...
Patent number
10,825,659
Issue date
Nov 3, 2020
Lam Research Corporation
Jason Lee Treadwell
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Variable depth edge ring for etch uniformity control
Patent number
10,651,015
Issue date
May 12, 2020
Lam Research Corporation
Ivelin Angelov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas exhaust by-product measurement system
Patent number
10,302,553
Issue date
May 28, 2019
Lam Research Corporation
Cristian Siladie
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Reference Box for Direct-Drive Radiofrequency Power Supply
Publication number
20240404804
Publication date
Dec 5, 2024
LAM RESEARCH CORPORATION
Alexander Miller Paterson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metrology Enclosure Including Spectral Reflectometry System for Pla...
Publication number
20240395519
Publication date
Nov 28, 2024
LAM RESEARCH CORPORATION
Alexander Miller Paterson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VARIABLE DEPTH EDGE RING FOR ETCH UNIFORMITY CONTROL
Publication number
20200273671
Publication date
Aug 27, 2020
LAM RESEARCH CORPORATION
Ivelin Angelov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS EXHAUST BY-PRODUCT MEASUREMENT SYSTEM
Publication number
20190064057
Publication date
Feb 28, 2019
LAM RESEARCH CORPORATION
Cristian SILADIE
G01 - MEASURING TESTING
Information
Patent Application
VARIABLE DEPTH EDGE RING FOR ETCH UNIFORMITY CONTROL
Publication number
20170236741
Publication date
Aug 17, 2017
LAM RESEARCH CORPORATION
Ivelin Angelov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING CHAMBER INCLUDING MULTIPLE GAS INJECTION POINT...
Publication number
20170200586
Publication date
Jul 13, 2017
LAM RESEARCH CORPORATION
Jason Lee Treadwell
H01 - BASIC ELECTRIC ELEMENTS