Cristian Wagner

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Microlithography projection objective including deformable mirror w...
- Patent number 7,294,814
- Issue date Nov 13, 2007
- Carl Zeiss SMT AG
- Cristian Wagner
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective with adaptive mirror and projecti...
- Patent number 7,112,772
- Issue date Sep 26, 2006
- Carl Zeiss SMT AG
- Cristian Wagner
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Catadioptric projection objective with adaptive mirror and projecti...
- Publication number 20040144915
- Publication date Jul 29, 2004
- Cristian Wagner
- G02 - OPTICS