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Cristina Cheung
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San Jose, CA, US
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last 30 patents
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Patent Grant
Use of scatterometry for in-situ control of gaseous phase chemical...
Patent number
6,630,361
Issue date
Oct 7, 2003
Advanced Micro Devices, Inc.
Bhanwar Singh
G01 - MEASURING TESTING
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Patent Grant
System to determine suitability of sion arc surface for DUV resist...
Patent number
6,597,463
Issue date
Jul 22, 2003
Advanced Micro Devices, Inc.
Bhanwar Singh
G01 - MEASURING TESTING