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Cuiyang Wang
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Singapore, SG
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last 30 patents
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Patent Grant
Method for improving oxide erosion of tungsten CMP operations
Patent number
6,569,770
Issue date
May 27, 2003
Chartered Semiconductor Manufacturing Ltd.
Xian Bin Wang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
New method for improving oxide erosion of tungsten CMP operations
Publication number
20030003745
Publication date
Jan 2, 2003
Chartered Semiconductor Manufacturing Ltd.
Xian Bin Wang
H01 - BASIC ELECTRIC ELEMENTS