Curt D. Bergeron

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Danvers, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Indirectly heated cathode ion source
- Patent number 7,138,768
- Issue date Nov 21, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Peter E. Maciejowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas flow restricting cathode system for ion implanter and related m...
- Patent number 6,984,831
- Issue date Jan 10, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Gas flow restricting cathode system for ion implanter and related m...
- Publication number 20050194550
- Publication date Sep 8, 2005
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Indirectly heated cathode ion source
- Publication number 20030218428
- Publication date Nov 27, 2003
- Peter E. Maciejowski
- H01 - BASIC ELECTRIC ELEMENTS