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Downingtown, PA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Fluorocarbon molecules for high aspect ratio oxide etch
Patent number
11,152,223
Issue date
Oct 19, 2021
American Air Liquide, Inc.
Curtis Anderson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemistries for TSV/MEMS/power device etching
Patent number
10,720,335
Issue date
Jul 21, 2020
American Air Liquide, Inc.
Peng Shen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluorocarbon molecules for high aspect ratio oxide etch
Patent number
10,381,240
Issue date
Aug 13, 2019
American Air Liquide, Inc.
Curtis Anderson
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Chemistries for TSV/MEMS/power device etching
Patent number
9,892,932
Issue date
Feb 13, 2018
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Peng Shen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching semiconductor structures with etch gas
Patent number
9,773,679
Issue date
Sep 26, 2017
American Air Liquide, Inc.
Rahul Gupta
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Fluorocarbon molecules for high aspect ratio oxide etch
Patent number
9,514,959
Issue date
Dec 6, 2016
American Air Liquide, Inc.
Curtis Anderson
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Cyclic amino compounds for low-k silylation
Patent number
8,999,734
Issue date
Apr 7, 2015
American Air Liquide, Inc.
James J. F. McAndrew
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Vapor deposition methods of SiCOH low-k films
Patent number
8,932,674
Issue date
Jan 13, 2015
American Air Liquide, Inc.
Christian Dussarrat
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
FLUOROCARBON MOLECULES FOR HIGH ASPECT RATIO OXIDE ETCH
Publication number
20190326129
Publication date
Oct 24, 2019
American Air Liquide, Inc.
Curtis ANDERSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMISTRIES FOR TSV/MEMS/POWER DEVICE ETCHING
Publication number
20180366336
Publication date
Dec 20, 2018
American Air Liquide, Inc.
Peng SHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMISTRIES FOR TSV/MEMS/POWER DEVICE ETCHING
Publication number
20180076046
Publication date
Mar 15, 2018
American Air Liquide, Inc.
Peng SHEN
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
METHOD OF ETCHING SEMICONDUCTOR STRUCTURES WITH ETCH GAS
Publication number
20170352546
Publication date
Dec 7, 2017
American Air Liquide, Inc.
Rahul GUPTA
C07 - ORGANIC CHEMISTRY
Information
Patent Application
CHEMISTRIES FOR TSV/MEMS/POWER DEVICE ETCHING
Publication number
20170103901
Publication date
Apr 13, 2017
American Air Liquide, Inc.
Peng SHEN
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
FLUOROCARBON MOLECULES FOR HIGH ASPECT RATIO OXIDE ETCH
Publication number
20170032976
Publication date
Feb 2, 2017
American Air Liquide, Inc.
Curtis ANDERSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCHING SEMICONDUCTOR STRUCTURES WITH ETCH GAS
Publication number
20160307764
Publication date
Oct 20, 2016
American Air Liquide, Inc.
Rahul GUPTA
C07 - ORGANIC CHEMISTRY
Information
Patent Application
FLUOROCARBON MOLECULES FOR HIGH ASPECT RATIO OXIDE ETCH
Publication number
20150294880
Publication date
Oct 15, 2015
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Curtis ANDERSON
C07 - ORGANIC CHEMISTRY
Information
Patent Application
VAPOR DEPOSITION METHODS OF SiCOH LOW-K FILMS
Publication number
20130042790
Publication date
Feb 21, 2013
L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
Christian Dussarrat
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CYCLIC AMINO COMPOUNDS FOR LOW-K SILYLATION
Publication number
20100233829
Publication date
Sep 16, 2010
American Air Liquide Inc.
James J.F. McANDREW
C07 - ORGANIC CHEMISTRY