Curtis Bailey

Person

West Linn, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 12,163,219
- Issue date Dec 10, 2024
- Lam Research Corporation
- Damodar Rajaram Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 11,851,760
- Issue date Dec 26, 2023
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 11,725,283
- Issue date Aug 15, 2023
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic sheath control with edge ring lift
- Patent number 11,512,393
- Issue date Nov 29, 2022
- Lam Research Corporation
- Jacob Lee Hiester
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 11,441,222
- Issue date Sep 13, 2022
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 11,365,479
- Issue date Jun 21, 2022
- Lam Research Corporation
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controlling showerhead heating via resistive thermal measurements
- Patent number 10,872,747
- Issue date Dec 22, 2020
- Lam Research Corporation
- Nick Ray Linebarger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 10,851,457
- Issue date Dec 1, 2020
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 10,760,158
- Issue date Sep 1, 2020
- Lam Research Corporation
- Damodar Shanbhag
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High power low pressure UV bulb with plasma resistant coating
- Patent number 10,354,857
- Issue date Jul 16, 2019
- Lam Research Corporation
- Xiaolan Chen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Clean resistant windows for ultraviolet thermal processing
- Patent number 10,240,236
- Issue date Mar 26, 2019
- Lam Research Corporation
- James Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for supplying vaporized precursor
- Patent number 9,637,821
- Issue date May 2, 2017
- Lam Research Corporation
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor vapor generation and delivery system with filters and fil...
- Patent number 8,628,618
- Issue date Jan 14, 2014
- Novellus Systems Inc.
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20240309507
- Publication date Sep 19, 2024
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FACELESS SHOWERHEAD
- Publication number 20230366089
- Publication date Nov 16, 2023
- Lam Research Corporation
- Shriram Vasant Bapat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT
- Publication number 20230088715
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Jacob Lee Hiester
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN SITU SURFACE COATING OF PROCESS CHAMBER
- Publication number 20230052089
- Publication date Feb 16, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Womack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20230002891
- Publication date Jan 5, 2023
- LAM RESEARCH CORPORATION
- Damodar Rajaram SHANBHAG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNABLE AND NON-TUNABLE HEAT SHIELDS TO AFFECT TEMPERATURE DISTRIBU...
- Publication number 20220333239
- Publication date Oct 20, 2022
- LAM RESEARCH CORPORATION
- Ashish SAURABH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20220275504
- Publication date Sep 1, 2022
- LAM RESEARCH CORPORATION
- Damodar Rajaram SHANBHAG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20220162755
- Publication date May 26, 2022
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20220162754
- Publication date May 26, 2022
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20220162753
- Publication date May 26, 2022
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD FOR DEPOSITION TOOLS HAVING MULTIPLE PLENUMS AND GAS DIS...
- Publication number 20220093366
- Publication date Mar 24, 2022
- Michael J. JANICKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Depositing a Film on a Backside of a Substrate
- Publication number 20210108314
- Publication date Apr 15, 2021
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20200347497
- Publication date Nov 5, 2020
- LAM RESEARCH CORPORATION
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT
- Publication number 20200173018
- Publication date Jun 4, 2020
- LAM RESEARCH CORPORATION
- Jacob Lee Hiester
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROLLING SHOWERHEAD HEATING VIA RESISTIVE THERMAL MEASUREMENTS
- Publication number 20200051789
- Publication date Feb 13, 2020
- LAM RESEARCH CORPORATION
- Nick Ray LINEBARGER
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20190185999
- Publication date Jun 20, 2019
- LAM RESEARCH CORPORATION
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD Deposition System for Deposition on Selective Side of the Sub...
- Publication number 20190062918
- Publication date Feb 28, 2019
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH POWER LOW PRESSURE UV BULB WITH PLASMA RESISTANT COATING
- Publication number 20180182607
- Publication date Jun 28, 2018
- LAM RESEARCH CORPORATION
- Xiaolan Chen
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
CLEAN RESISTANT WINDOWS FOR ULTRAVIOLET THERMAL PROCESSING
- Publication number 20160258057
- Publication date Sep 8, 2016
- LAM RESEARCH CORPORATION
- James Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SUPPLYING VAPORIZED PRECURSOR
- Publication number 20140096834
- Publication date Apr 10, 2014
- LAM RESEARCH CORPORATION
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR VAPOR GENERATION AND DELIVERY SYSTEM WITH FILTERS AND FIL...
- Publication number 20110111136
- Publication date May 12, 2011
- NOVELLUS SYSTEMS INC.
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Curtis Bailey

Person

Patents Grantslast 30 patents

Ex situ coating of chamber components for semiconductor processing

PECVD deposition system for deposition on selective side of the sub...

PECVD deposition system for deposition on selective side of the sub...

Dynamic sheath control with edge ring lift

PECVD deposition system for deposition on selective side of the sub...

Ex situ coating of chamber components for semiconductor processing

Controlling showerhead heating via resistive thermal measurements

PECVD deposition system for deposition on selective side of the sub...

Ex situ coating of chamber components for semiconductor processing

High power low pressure UV bulb with plasma resistant coating

Clean resistant windows for ultraviolet thermal processing

Method for supplying vaporized precursor

Precursor vapor generation and delivery system with filters and fil...

Patents Applicationslast 30 patents

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

FACELESS SHOWERHEAD

DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT

IN SITU SURFACE COATING OF PROCESS CHAMBER

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

TUNABLE AND NON-TUNABLE HEAT SHIELDS TO AFFECT TEMPERATURE DISTRIBU...

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

SHOWERHEAD FOR DEPOSITION TOOLS HAVING MULTIPLE PLENUMS AND GAS DIS...

Methods for Depositing a Film on a Backside of a Substrate

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT

CONTROLLING SHOWERHEAD HEATING VIA RESISTIVE THERMAL MEASUREMENTS

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

PECVD Deposition System for Deposition on Selective Side of the Sub...

HIGH POWER LOW PRESSURE UV BULB WITH PLASMA RESISTANT COATING

CLEAN RESISTANT WINDOWS FOR ULTRAVIOLET THERMAL PROCESSING

METHOD FOR SUPPLYING VAPORIZED PRECURSOR

PRECURSOR VAPOR GENERATION AND DELIVERY SYSTEM WITH FILTERS AND FIL...