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Cynthia C. Lee
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Orlando, FL, US
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last 30 patents
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Patent Grant
Overlay metrology using scatterometry profiling
Patent number
6,985,229
Issue date
Jan 10, 2006
Agere Systems, INC
Cynthia C. Lee
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Overlay metrology using scatterometry profiling
Publication number
20030223066
Publication date
Dec 4, 2003
Cynthia C. Lee
G01 - MEASURING TESTING
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Patent Application
Patterned implant metrology
Publication number
20030184769
Publication date
Oct 2, 2003
Erik Cho Houge
G01 - MEASURING TESTING